XEI Scientific Products Page
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XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.
PRICING: Contact local distributors, listed in our Sales page. Updated August 17, 2011.
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New EUV Product
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| Evactron Model 25 De-Contaminator |
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Pre-programmed automatic cleaning, no manual adjustments needed. Tabletop enclosure can be moved from lab to lab. Serial port allows PC communication with controller. GUI interface provided. Detailed info. on the Evactron Model 25 Decontaminator
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Evactron SoftClean Chamber
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The SoftClean™ Chamber/Evactron combination can pre-clean specimens and specimen mounts with suspicious or known high levels of contamination before their introduction into a microscope chamber. Detailed info. on the Evactron SoftClean Chamber
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| Evactron Model 40 De-Contaminator |
| Pre-programmed automatic cleaning, no manual adjustments needed. Rack mounted (2U) enclosure. No front panel interface. Serial port allows PC communication with controller. GUI interface provided. Detailed info. on the Evactron Model 40 Decontaminator |
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Plasma Radical Source (PRS) options
Click Image for Larger View/More Information
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PRS-v
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PRS-p |
PRS-u |
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| NEW!! TEM Wand for JEOL TEMs |
The RF electrode used to create the oxygen radicals is now mounted on the end of a TEM sample rod. The user first vents the chamber and then inserts the Wand similar to the way one would insert a sample rod. Now cleaning in the TEM can occur right where it is needed in the sample examination region.Detailed info. on the Evactron TEM Wand Decontaminator
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| Adapter Flanges made by XEI Scientific, Inc. |
Required Accessory for most SEMs. Sold separately. Adapter Flanges are made for ports on all major microscope manufacturers systems. Measure outside diameter and o-ring inner diameter to determine correct flange. Also note bolt hole pattern. AF.pdf
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Search Engine Topics: Evactron De-Contaminator, Electron Microscope Accessory, Plasma Cleaner for Electron Microscopes
Plasma Ashing device, Hydrocarbon and Organic Contamination Control in Vacuum Systems, The Evactron De-Contaminator stops black
squares, Evactron cleaning is similar to Glow Discharge Cleaning but is sputter free cleaning. SEM Anti-Contaminator,
SEM Scanning Electron Microscope anticontaminator, Clean microscope samples, Cleaning Organics and AMC (atmospheric molecular
contamination from high vacuum systems using the Evactron DeContaminator products. The Evactron D-C does EDX and EDS window
cleaning and RF Plasma Ashing in Electron Microscopes, clean FIBs, Evactron Softclean Chamber, Evactron CombiClean System.
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