XEI Scientific Inc.'s
Evactron® Model C Decontaminator
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XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.
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Evactron Model C Decontaminator
Download the Evactron Model C Decontaminator Spec Sheet.pdf
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This model is the most cost-efficient and least complex cleaning system offered by XEI Scientific. Ashing of carbon contamination such as hydrocarbons occurs by chemical etch, using gas-phase radicals produced in a remote RF plasma. The Evactron 25 De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination.
Over a 1,100 users of the Evactron De-Contaminator system report no X-ray window failures.
• Free 5 year limited warranty
• Easy setup and operation
The Evactron Model C includes:
• RF Plasma Radical Source (PRS) and Controller
• Pirani vacuum gauge and fixed RF Match
• 0-20 Watt RF Generator @ 13.56 MHz feedback
stabilized and harmonically suppressed
• Just use air for oxygen radicals, or use other
gases for alternative plasma processes
• Air-bleed needle valve for manual flow and
pressure adjustment
• Bundled cable set, power cord, and instructions
• Free 5 year limited warranty
• Power interlock allows RF power to be on only
when pressure is in operating range and RF cable
is connected to PRS
Specifications:
• Electronic chassis: H, W, D: 5.5” x 9.375” x
9.75” (14 x 24 x 25 cm)
• KF 40 vacuum mounting flange, adapter flanges
available
• 90-250 VAC 50/60 Hz input
• Shipping— 16 lb. (8 kg.)
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