XEI Scientific, Inc.
RF Plasma Cleaner for Electron Microscopes
and High Vacuum Systems

The EVACTRON® De-Contaminator
Stops Artifacts and Removes Hydrocarbons and Organics.

Updated March 2009

Evactron® Products Page

Evactron C Model
Local Control

Evactron 25 Model
Remote and Local Control

Evactron 45 Model
Local and remote control

Evactron 40 model
Remote controlled

DSS-1
Large Chamber Remote Asher

RFS-20
Low Power RF power Supply

Evactron ORS options

Now + on all Products

Evactron® 25, 40 and 45
 RF Plasma Ashers

Click on photo(s) for more information

   


Our newest microprocessor controlled systems are simple to operate with easy to customize operating recipes. Press the "Enable" button and the unit will start plasma cleaning in your chamber the next time the pressure is raised and evacuation is restarted form your instruments evacuation control system. Downstream Plasma cleaning recipe setup is done either through a computer interface or from the front panel. 5-20 Watts of RF power for optimum low power cleaning with air.

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ORS (Oxygen Radical Sources)
for Evactron ® D-C Models 25, 40 and 45

Ors Specs .pdf

The Standard ORS is supplied with each system unless optional ORS is ordered.

   

   

  Standard ORS

   

  ORS H (high vacuum)

   

  ORS U (ultra-high vacuum)

   

 

    Standard ORS

  • Assembled body
  • KF 40 fittings
  • Viton O-rings and seals
  • High vacuum tested to
    < 5X10>-7 Torr

 

 

    ORS H

  • One piece body
  • KF 40 fitting to chamber
  • Viton Orings and valve seal
  • He leak tested to
    < 10>-8 atm cc/sec

 

    ORS U

  • One piece Body
  • CF fitting to chamber
  • All metal seals and valve seats
  • He Leak tested to
    < 10>-9 atm cc/sec

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Classic Evactron® De-Contaminators

   

Evactron® C

   

Evactron® 10

   

   

   

 

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DSS1 Dry Plasma System:

High power cleaning of large chambers with flowing afterglow.

NEW Dry Plasma DSS1 .pdf

XEI Scientific, Inc in association with Dry Plasma Systems, Inc. introduces new products to complement the Evactron® D-C. While the products are very similar, DSS1 - 100 Plasma Source and DSS1 Control Units are  for gentle effective cleaning of larger chambers.

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Gentle Asher:

Desktop Evactron cleaning of specimen without sputtering with this accessory.

Pre-cleans the samples and works
great with Evactron's chamber cleaning.

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XEI Scientific Evactron® Adaptor Flanges - Required Accessory for most SEMs.
Sold separately.

OTHER INFO: For OEM applications where a racked mounted controller and central computer control are desired for SEM and FIB cleaning. Similar Vacuum and RF power control to Evactron 10. Uses Evactron 10 ORS valve assembly with modular vacuum gauge.

PRICING: Prices are FOB Redwood City, CA in US Dollars. Freight, Distributor fees, Customs duties, Taxes, fees and other local charges are not included. Installation andtraining extra.