Products

XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a low power 13.56 MHz RF generator.

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Evactron® EP De-Contaminator

XEI Scientific, Inc’s latest model remote RF plasma cleaning system, the Evactron® EP De-Contaminator, is the newest model in our E-series. The Evactron EP model was designed for those in the physics and materials science communities building and using custom-designed … Read More

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Evactron® 25 Zephyr™ De-Contaminator

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Z Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber … Read More

Pre-programmed automatic cleaning, no manual adjustments needed. Tabletop enclosure can be moved from lab to lab. Serial port allows PC communication with controller. GUI interface provided.

Evactron® Model 25 De-Contaminator

This convenient tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron 25 De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination. Over … Read More

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Evactron® Model 40 De-Contaminator

This rack-mounted model can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron 40 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing hydrocarbon … Read More

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Evactron® Model 45 De-Contaminator

This rack-mounted models can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron Model 45 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing … Read More

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Evactron® Model C De-Contaminator

This model is the most cost-efficient and least complex cleaning system offered by XEI Scientific. Ashing of carbon contamination such as hydrocarbons occurs by chemical etch, using gas-phase radicals produced in a remote RF plasma. The Evactron C De-Contaminator uses … Read More

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Evactron® Model ES De-Contaminator

The new, revolutionary Evactron® ES De-Contaminator provides a new approach to plasma cleaning designed for OEM and system electron microscope manufacturers. The ES model starts easily with patent pending “POP” plasma ignition process. This simplified Evactron Plasma Radical Source (PRS) … Read More

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Evactron® SoftClean™ Chamber

Electron microscope image quality is greatly improved by the removal of hydrocarbon (H/C) contamination from microscope chambers and from specimen mounts, specimen holders, and the specimens themselves. XEI Scientific developed the Evactron De-Contaminator to clean microscope chambers of their residual … Read More

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Evactron® CombiClean™ System

The Evactron® CombiClean™System combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system. Decontaminate specimens and columns of SEMs and FIBs.   Innovative Design Designed as a complete cleaning solution, the Evactron CombiClean System … Read More