XEI Scientific, Inc.

RF Plasma Cleaning Systems for Electron Microscopes and High Vacuum Systems

The EVACTRON® Anti-Contaminator and De-Contaminator Stops Artifacts and Removes Hydrocarbons and Organics.

Updated May 2008

 
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Cleans Scanning Electron Microscopes (SEMS)

See you at the M & M Conference August 2008

Evactron® RF Plasma Cleaner removes atmospheric molecular contamination, improves scanning electron microscope (SEM) performance. Cleans vacuum chambers and substrates improving adhesion and uniformity of fine vacuum coatings. The Evactron De-Contaminator is a RF plasma asher for external mounting on vacuum chambers and electron microscopes. Low power up to 20 Watts! Uses air for gentle oxidation.

Evactron® cleaning removes contamination artifacts in so you get great SEM photos!

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How to contact us:
XEI Scientific, Inc.
1755 East Bayshore Rd, Suite 17
Redwood City, CA 94063
Phone 1 (650) 369-0133
1 (800) 500-0133
FAX 650-363-1659

General technical inquiries:
information@evactron.com

Sales and quotations: Sales@evactron.com
1 (415) 566-5774 fax 1 (415) 566-9779

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Vincent Carlino XEI sales

Cleaner Substrates for fine vacuum coatings

Latest News For Cleaner Substrates !

XEI Scientific, Inc. introduced our line of Evactron® RF Plasma cleaners at the Vacuum Coaters Society Meeting April 19 - 24, 2008 in Chicago, Illinois. Dr. Christopher G. Morgan gave a presentation on the gentle cleaning of vacuum chambers using
                  Evactron® remote plasma, see paper.

Another interesting presentation was by a researcher Elisabeth Strein, working with Prof. David Allred at Brigham Young University. A "green" cleaning technique for Si/SiO2 ultrathin films was presented titled: Eliminating adventitious carbon contamination on silicon wafers.
An Evactron® plasma cleaner was adapted fpr adventitious carbon removal and to minimize the effects of instrumental contamination, i.e. XPS system hydrocarbon deposits on the surface of samples.

XEI Scientific, Inc joined a National Science Foundation (NSF) research group.

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New Evactron De-Contaminators (D-C)

Evactron® 25 Tabletop D-C

Evactron® 45 Rackmounted D-C