Products

XEI Scientific, Inc. is the world leader in downstream RF plasma cleaners for the removal of Hydrocarbons from Scanning Electron Microscopes (SEM) and vacuum chambers. XEI manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device, which comes in a variety of models to fit user needs and budgets.

Our new models in the Zephyr and E-Series feature fast flowing afterglow cleaning with air when pumped with a turbo molecular pump to below 30 mTorr or 4 Pa or 40 mBar. The E-Series are our new simplified units to provide reliable plasma cleaning at the highest performance with the lowest cost. Evactron Plasma Cleaners are the manufacturer’s choice for cleaning new and old SEMs and FIBs.

ep_large

Evactron® EP De-Contaminator

  XEI Scientific, Inc’s latest model remote RF plasma cleaning system, the Evactron® EP De-Contaminator, is the newest model in our E-series. The Evactron EP model was designed for those in the physics and materials science communities building and using … Read More

e25zephyr_large

Evactron® 25 Zephyr™ De-Contaminator

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Z Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber … Read More

Pre-programmed automatic cleaning, no manual adjustments needed. Tabletop enclosure can be moved from lab to lab. Serial port allows PC communication with controller. GUI interface provided.

Evactron® Model 25 De-Contaminator

This convenient tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron 25 De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination. Over … Read More

e40_large

Evactron® Model 40 De-Contaminator

This rack-mounted model can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron 40 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing hydrocarbon … Read More

e45_large

Evactron® Model 45 De-Contaminator

This rack-mounted models can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron Model 45 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing … Read More

ec_large

Evactron® Model C De-Contaminator

This model is the most cost-efficient and least complex cleaning system offered by XEI Scientific. Ashing of carbon contamination such as hydrocarbons occurs by chemical etch, using gas-phase radicals produced in a remote RF plasma. The Evactron C De-Contaminator uses … Read More

es_large

Evactron® Model ES De-Contaminator

The new, revolutionary Evactron® ES De-Contaminator provides a new approach to plasma cleaning designed for OEM and system electron microscope manufacturers. The ES model starts easily with patent pending “POP” plasma ignition process. This simplified Evactron Plasma Radical Source (PRS) … Read More

sc_and_e25_large

Evactron® SoftClean™ Chamber

Electron microscope image quality is greatly improved by the removal of hydrocarbon (H/C) contamination from microscope chambers and from specimen mounts, specimen holders, and the specimens themselves. XEI Scientific developed the Evactron De-Contaminator to clean microscope chambers of their residual … Read More

combiclean_large

Evactron® CombiClean™ System

The Evactron® CombiClean™System combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system. Decontaminate specimens and columns of SEMs and FIBs.   Innovative Design Designed as a complete cleaning solution, the Evactron CombiClean System … Read More